The possible use of the QCM method to evaluate clean room environment

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Dr. Ender Ferenc
Department of Electron Devices

The QCM (Quartz Crystal Microbalance) measurement increasingly starting to be spread. However, the measurement of the air flow of the dust deposited crystal use is not yet widespread.

I seeking solution with different procedures in my thesis, that how can I precisely measure the quantity and concentration of dust in the air with this microbalance, which detects resonance frequency variance of quartz crystal resonator. This measurement exploits, that resonance frequency changes when mass changes. Mass changes for example when dust or other contamination is on the crystal.

It was a challenge during my work, that there are other factors, which can easily influence measurement. So, the significant part of my task is to create that kind of models and experiments, where the quantity of dust changes, but other factors not. Other factors can be for example temperature or humidity.

The main reason is to be able to measure the enviroment of cleanroom, which can be classified by measure the quantity of dust or contamination in a cubic feet air with QCM measurement.


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