Finite element analysis of electrostatic MEMS structures

OData support
Dr. Szabó Péter Gábor
Department of Electron Devices

In this paper, the state-of-the-art surface micromachining technologies such as Silicon-on-Insulator (SOI), Poly-MUMPs and SUMMiT-V (Sandia Ultra-Planar Multi-level MEMS Technology V) are discussed including their advantages and disadvantages. These surface micromachining technologies are used in the fabrication of MEMS (micro-electromechanical systems) devices.

Basics of finite element analysis which is a computer based method using for the analyzing of advanced engineering systems and analytical description of comb-drive structures are discussed. Comb-drive structures are widely used electromechanical systems (micromirrors, resonators, electromechanical filters, optical shutters, microgrippers, vibro-motors and micromechanical gears, etc.) which can be used for actuation or sensing.

Two basic comb-drive MEMS structure are created and simulated by using ANSYS engineering simulation and 3D design software, version 18.2. Then, more complex comb-drive based MEMS structure, accelerometer, is created and simulated. The results of the numerical analysis are compared with the results of the analytical analysis.


Please sign in to download the files of this thesis.