Finite element analysis of electrostatic MEMS structures

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Supervisor:
Dr. Szabó Péter Gábor
Department of Electron Devices

In this paper, the state-of-the-art surface micromachining technologies such as Silicon-on-Insulator (SOI), Poly-MUMPs and SUMMiT-V (Sandia Ultra-Planar Multi-level MEMS Technology V) are discussed including their advantages and disadvantages. These surface micromachining technologies are used in the fabrication of MEMS (micro-electromechanical systems) devices.

Basics of finite element analysis which is a computer based method using for the analyzing of advanced engineering systems and analytical description of comb-drive structures are discussed. Comb-drive structures are widely used electromechanical systems (micromirrors, resonators, electromechanical filters, optical shutters, microgrippers, vibro-motors and micromechanical gears, etc.) which can be used for actuation or sensing.

Two basic comb-drive MEMS structure are created and simulated by using ANSYS engineering simulation and 3D design software, version 18.2. Then, more complex comb-drive based MEMS structure, accelerometer, is created and simulated. The results of the numerical analysis are compared with the results of the analytical analysis.

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