Biosensors utilizing surface plasmon resonance (SPR) phenomenon are among the most sensitive optical affinity sensors that do not use specific molecule markers. Besides the classical thin film based sensors, it is possible to use localized plasmons on nanoparticles or nanostructures for sensing. The excitation wavelength of the plasmon resonace localised on the nanoparticles is strongly depending on the geometrical parameters of the particles (size, shape, arrangement) and thus on the parameters used during the fabrication of the sensor. For the sake of sensitivity, it is important for these devices to produce the highest amount of extinction peak shift for the changes in the refractive index of the surrounding media, which is the monitored signal. Because of this it is vital, to control the geometrical parameters of the particles during fabrication and create nanoparticles with uniform size and shape, to form an ordely arrangement during the fabrication and to maintain this orderly arrangement during the transfer to the substrate.