Microfluidic devices are a special type of MEMS. Microfluidic solutions, and microlaboratories based on microfluidics are more and more common in modern medical diagnostics instruments. The next generation of medical instruments are based on these Lab-On-a-Chip systems.
The goal of this thesis is the introduction and development of an important step in the production of microfluidic devices, the sealing of microfluidic channels. This experiment can be carried out using equipment available in the cleanroom of the Department of Electron Devices. Based on the accessible materials I did research on plasma bonding, and tried to implement it. The technological parameters were set with experiments carried out by bonding PDMS – that is a silicon based elastomer – to glass and silicon substrates. The setup was validated by qualitative and quantitative methods. The quality of the bonding was first examined with optical inspection, then with shear and peel tests. The pressure test was performed on a sealed microfluidic channel designed for hydrodynamic focusing. The surface modifying effect of the plasma treatment was examined with contact angle measurement.